JPH0731125Y2 - 剪断形半導体歪みゲージ - Google Patents
剪断形半導体歪みゲージInfo
- Publication number
- JPH0731125Y2 JPH0731125Y2 JP1446889U JP1446889U JPH0731125Y2 JP H0731125 Y2 JPH0731125 Y2 JP H0731125Y2 JP 1446889 U JP1446889 U JP 1446889U JP 1446889 U JP1446889 U JP 1446889U JP H0731125 Y2 JPH0731125 Y2 JP H0731125Y2
- Authority
- JP
- Japan
- Prior art keywords
- output
- type semiconductor
- strain gauge
- shear type
- semiconductor strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 47
- 238000010586 diagram Methods 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1446889U JPH0731125Y2 (ja) | 1989-02-09 | 1989-02-09 | 剪断形半導体歪みゲージ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1446889U JPH0731125Y2 (ja) | 1989-02-09 | 1989-02-09 | 剪断形半導体歪みゲージ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02105108U JPH02105108U (en]) | 1990-08-21 |
JPH0731125Y2 true JPH0731125Y2 (ja) | 1995-07-19 |
Family
ID=31225695
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1446889U Expired - Lifetime JPH0731125Y2 (ja) | 1989-02-09 | 1989-02-09 | 剪断形半導体歪みゲージ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0731125Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2500331B2 (ja) * | 1991-06-13 | 1996-05-29 | 工業技術院長 | 微小変位検出器 |
-
1989
- 1989-02-09 JP JP1446889U patent/JPH0731125Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02105108U (en]) | 1990-08-21 |
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